Ultra fine particle film forming method and apparatus

ABSTRACT

A ultra fine particle film forming apparatus is provided which is capable of forming a ultra fine particle film which has ultra fine particles sufficiently bonded together, sufficient density, flat surface and uniform density. A planarized ultra fine particle film forming method for forming a planarized ultra fine particle film from a deposited film of ultra fine particles formed by supplying the ultra fine particles to a substrate, the method comprising one or more of a planarizing step of planarizing a surface of the deposited film of the ultra fine particles supplied to the substrate.

BACKGROUND OF THE INVENTION

[0001] a) Field of the Invention

[0002] The present invention relates to techniques of supplying ultrafine particles of ceramic, metal and the like not larger than about 1 μmto a substrate to form a ultra fine particle film. Such techniques offorming a ultra fine particle film are applied to the technical fieldsof forming a functional ceramic thin film, a metal thin film or the likeon a substrate.

[0003] b) Description of the Related Art

[0004] As one of techniques of forming a ultra fine particle film, it isknown to mix ultra fine particles with transport gas and spray theparticles mixed with the transport gas from a nozzle toward a substratesurface to form a ultra fine particle film.

[0005] This conventional ultra fine particle film forming method is,however, associated with some problems that the film surface is notsmooth and flat and the density of the film is not uniform.Specifically, with the conventional ultra fine particle film formingmethod, if ultra fine particles contain defective particles (such asparticles having a diameter of 1 μm or larger and insufficientlyaccelerated particles) unable to physically form a film, these defectiveparticles are mixed in a deposit on a substrate.

[0006] More specifically, if ultra fine particles jetted out during afilm deposition contain a particle (defective particle) 31 having alarge particle diameter or an insufficient speed, as shown in aschematic diagram of FIG. 9A and a microscopic photograph shown in FIG.10A, the large diameter defective particle 31 attaches to and sinks inthe surface layer of a deposit 32 under growth, and this defectiveparticle 31 functions as a mask so that deposition does not occurthereafter on the surface of this defective particle 31. As shown inFIGS. 9A and 10B, the film 33 after cleaning has a depression 34. Asshown in a microscopic photograph of FIG. 11, the film surface is veryrough, which adversely affects later deposition. Since the defectiveparticle is in a floating state in the deposit 32, the film is not denseand the surface of the deposit is abraded by ultra fine particles to belater blown toward the surface. Also in this case, as shown in FIG. 9B,the film 33 has a depression 34 and the film surface is very rough,which adversely affects later deposition. If such a conventional filmforming method is applied to forming a ceramic electronic componentwhich is required to have a homogeneously controlled fine structure ofthe film, excellent electrical characteristics cannot be expected.

[0007] It is also practically difficult to make the amount of fineparticles to be jetted out of a nozzle uniform and constant, so that thefilm thickness changes at positions. It is also difficult to control afilm thickness and a surface uniformity, which becomes a large obstacleagainst forming films having uniform performance and good film quality.Such irregular film thickness and surface roughness become a criticalissue when the conventional method is applied to forming an optical thinfilm.

[0008] It has been desired to provide techniques of forming a ultra fineparticle film which has ultra fine particles sufficiently bondedtogether, sufficient density, flat surface and uniform density.

SUMMARY OF THE INVENTION

[0009] The invention has been made under such circumstances. It is anobject of the present invention to provide a ultra fine particle filmforming apparatus capable of forming a ultra fine particle film whichhas ultra fine particles sufficiently bonded together, sufficientdensity, and particularly flat surface and uniform density.

[0010] In order to achieve the above object of the invention, there isprovided a planarized ultra fine particle film forming method forforming a planarized ultra fine particle film from a deposited film ofultra fine particles formed by supplying the ultra fine particles to asubstrate, the method comprising one or more of a planarizing step ofplanarizing a surface of the deposited film of the ultra fine particlessupplied to the substrate.

[0011] According to another aspect of the invention, there is provided aplanarized ultra fine particle film forming apparatus for forming aplanarized ultra fine particle film from a deposited film of ultra fineparticles formed by supplying the ultra fine particles to a substrate,the apparatus comprising at least one of: an attached particle removalapparatus for rolling or scraping a surface layer portion of thedeposited film of the ultra fine particles supplied to the substrate; afilm surface processing apparatus for grinding or polishing the surfacelayer portion; and a pressure apparatus for pressing the deposited film.

[0012] According to another aspect of the invention, there is provided aplanarized ultra fine particle film forming method for forming aplanarized ultra fine particle film from a deposited film of ultra fineparticles formed by supplying the ultra fine particles to a substrate,the method comprising one or more of a planarizing step of planarizing asurface of the deposited film of the ultra fine particles by blowingplanarizing fine particles having a grinding/polishing function at anoblique incidence angle toward the surface of the deposited film.

[0013] According to another aspect of the invention, there is provided aplanarized ultra fine particle film forming apparatus for forming aplanarized ultra fine particle film from a deposited film of ultra fineparticles formed by supplying the ultra fine particles to a substrate,wherein planarizing fine particles having a grinding/polishing functionare blown at an oblique incidence angle toward the surface of thedeposited film.

BRIEF DESCRIPTION OF THE DRAWINGS

[0014]FIG. 1 is a schematic diagram showing the structure of aplanarized ultra fine particle film forming apparatus according to anembodiment of the invention.

[0015]FIG. 2 is a schematic diagram showing the structure of aplanarized ultra fine particle film forming apparatus according toanother embodiment of the invention.

[0016]FIG. 3 is a schematic diagram showing the structure of aplanarized ultra fine particle film forming apparatus according to stillanother embodiment of the invention.

[0017]FIG. 4 is a schematic diagram showing an incidence angle ofplanarizing particles.

[0018]FIG. 5 is a schematic diagram showing an example of a sprayapparatus for blowing ultra fine particles and planarizing particles.

[0019]FIG. 6 is a schematic diagram showing another example of a sprayapparatus for blowing ultra fine particles and planarizing particles.

[0020]FIG. 7A is a schematic diagram showing another example of a sprayapparatus for blowing ultra fine particles and planarizing particles,and FIGS. 7B and 7C are graphs showing a diameter distribution ofplanarizing fine particles and ultra fine particles.

[0021]FIGS. 8A and 8B are vertical cross sectional views of sprayapparatus.

[0022]FIGS. 9A and 9B are cross sectional views showing deposited films.

[0023]FIGS. 10A and 10B are microscopic photographs showing crosssectional views of deposited films.

[0024]FIG. 1I is a microscopic photograph showing the surface of a filmsurface formed by conventional techniques.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0025] Embodiments of the invention will be described with reference tothe accompanying drawings.

[0026] In FIG. 1, reference numeral 1 represents a planarized ultra fineparticle film forming apparatus. The planarized ultra fine particle filmforming apparatus 1 has a substrate 3 and a nozzle 4 disposed in achamber 10. The nozzle 4 is an example of a ultra fine particle supplyapparatus. The substrate 3 is used for supporting a film to be formedthereon. An attached fine particle removal apparatus 5 and a filmsurface processing apparatus 6 are disposed along a substrate motionpath. The attached fine particle removal apparatus 5 and film surfaceprocessing apparatus 6 constitute a planarizing apparatus 15 forplanarizing a deposited film 2 a. The chamber 10 may be a vacuum chambercapable of reducing the inner pressure. If the vacuum chamber is used asthe chamber 10, the vacuum degree is set to about 10 to 200 Torr, orpreferably to about 100 Torr.

[0027] The nozzle 4 is used for supplying ultra fine particles to thesubstrate 3 to form a deposited film 2 a. The substrate 3 is mounted ona substrate drive apparatus (not shown) so that it can be driven movablyin the chamber. The nozzle 4 may be set so that it can also be drivenmovably in the chamber. Instead of jetting out transport gas and ultrafine particles from the nozzle 4 to the substrate 3, other methods maybe used depending upon the type or other conditions of ultra fineparticles, such as flowing ultra fine particles out of a slit uponapplication of fine vibrations.

[0028] The attached particle removal apparatus 5 scrapes the surface ofthe deposited film 2 a of ultra fine particles 7 supplied to thesubstrate 3 to planarize the surface and remove defective particles:including ultra fine particles having a large diameter and protrudingfrom the planarized surface and ultra fine particles attached on theplanarized surface. The attached particle removal apparatus 5 has anattached particle removal blade 8 and a gap control mechanism 11. Theattached particle removal blade 8 is made of hard rubber or a metalplate and is disposed near the nozzle 4. During the motion relative tothe substrate 3, the attached particle removal apparatus 5 scrapes thesurface of the deposited film 2 a of ultra fine particles supplied fromthe nozzle 4 to the substrate 3 to remove defective particles such asembedded large diameter ultra fine particles and attached ultra fineparticles and form a scraped film 2 b. The scrape amount of the surfaceof the deposited film 2 a by the attached particle removal blade 8 canbe adjusted by controlling a gap between the attached particle removalblade 8 and substrate 3. This adjustment is performed by operating thegap control mechanism 11 to drive the attached particle removal blade 8.

[0029] The scraped film 2 b formed by scraping a predetermined amount ofthe surface layer with the attached particle removal blade 8 is thenprocessed by a film surface processing apparatus 6. The film surfaceprocessing apparatus 6 has a grinding/polishing roller 12 and a gapcontrol mechanism 13. The grinding/polishing roller 12 is made of apolishing brush or a roller made of polishing material. Thegrinding/polishing roller 12 is rotated at a speed matching thesubstrate scan speed and made in contact with the surface scraped film 2b to grind and polish it to adjust the film thickness and form a finalfilm 2. In this case, the film thickness before and after thegrinding/polishing is measured by using a displacement gauge 14 such asan optical displacement gauge and an air micro displacement gauge. Inaccordance with the measured film thickness, the gap between the surfaceof the deposited film 2 a and surface scraped film 2 b and thegrinding/polishing roller 12 and attached particle removal blade 8 iscontrolled. Adjustment of the gap and pressure is performed by using thegap control mechanisms 11 and 13.

[0030] In this embodiment, the deposited film 2 a of ultra fineparticles 7 supplied to the substrate 3 is processed twice, first by theattached particle removal apparatus 5 to form the surface scraped film 2b and then by the film surface processing apparatus to form a final film2. If a film having the same property as the final film 2 can beobtained by one of the two processes, either a process by the attachedparticle removal apparatus 5 or a process by the film surface processingapparatus 6 may be executed.

[0031] In order to positively remove dusts to be generated while thefilm surface is ground/polished for film formation, a nozzle for jettingout a gas or a dust sucking mechanism may be installed near at theposition where the film surface is ground/polished.

[0032] If metal ultra fine particles are used, it is necessary to paymore attention to making a film denser than using ceramic ultra fineparticles which are brittle. In this context, it may be effective insome case to press the surface of the deposited film 2 a with a rollerto planarize the film surface by utilizing plastic deformation of metal.In this case, this roller is installed by replacing thegrinding/polishing roller 12.

[0033] The planarizing process of rolling or scraping, grinding orpolishing, or pressing the surface layer portion of a deposit of ultrafine particles supplied to the substrate, is executed each time thedeposited film 2 a of a single layer structure is formed by supplyingultra fine particles from the ultra fine particle supply apparatus tothe substrate. A combination of a process of forming the deposited filmof the single layer structure by a single supply of ultra fine particlesand the planarizing process for the deposited film of the single layerstructure may be performed a plurality of times. Alternatively, after adeposited film 2 a of a multi-layer structure is formed by a pluralityof supplies of ultra fine particles from the ultra fine particle supplyapparatus, the planarizing process may be performed for the depositedfilm 2 a of the multi-layer structure.

[0034] The former case of performing the planarizing process each timethe deposited film of the single layer structure is formed, is effectivefor making the final film dense in its inner region.

[0035] In the embodiment described above, in forming a ultra fineparticle film, the planarizing process of rolling or scraping, grindingor polishing, or pressing the surface layer portion of a deposited filmon the substrate, is executed. The invention is applicable to the filmforming method (refer to JP-A-10-208998) and the film forming method(refer to JP-A-11-117328). With the former method, ion beams, plasma orthe like is applied to ultra fine particles as source material or to thefilm surface during deposition to activate the ultra fine particles orthe film surface during deposition and bond at a low temperature theultra fine particles together or the film surface and ultra fineparticles. With the latter method, a mechanical impact force is appliedto the deposited film to crush ultra fine particles and bond the ultrafine particles of the deposited film. In this case, as shown in FIG. 2,a planarized ultra fine particle film forming apparatus 1 a is providedwith a plasma ion beam generator apparatus 35. A film may be formed byapplying ion beams, plasma or the like to ultra fine particles or to thefilm surface during deposition, or a film may be formed through lowtemperature bonding of ultra fine particles by applying a mechanicalimpulse force which is generated: by accelerating ultra fine particlesby an electrostatic field or gas transport and spraying them to andcolliding them with ultra fine particles on the substrate; by using abrush or roller rotating at high speed, a pressure needle moving up anddown at high speed, or a piston moving at high speed by explosion force;or by generating ultra sounds. Thereafter, the planarizing process ofrolling or scraping, grinding or polishing, or pressing the surfacelayer portion of each of these films, is executed. Alternatively, amechanical impact force loading apparatus 16 is used to load amechanical impact force to ultra fine particles of a deposited film, ascraped film, or a ground/polished film to crush these ultra fineparticles and bond them together. This mechanical impact force isapplied to the deposited film: by accelerating ultra fine particles byan electrostatic field or gas transport and spraying them to andcolliding them with ultra fine particles on the substrate; by using abrush or roller rotating at high speed, a pressure needle moving up anddown at high speed, or a piston moving at high speed by explosion force;or by generating ultra sounds. If ultra fine particles of the depositedfilm are to be bonded by applying the mechanical impact force to thedeposited film and crushing the ultra fine particles, the ultra fineparticles may be processed beforehand so that they can be crushed easilyby the mechanical impact force to be applied. This process may be aprocess of adjusting a preliminary baking temperature of ultra fineparticles, a process of heating ultra fine particles prepared to have aparticle diameter of about several tens nm and aggregating them to formsecondary particles having a particle diameter of about 50 nm to 1 μm,or a process of forming cracks in ultra fine particles so as to makethem easy to be crushed, by using for a long time period a breaker orcrusher such as a ball mill, a jet mill, a vibration mill, an epicyclicmill and a bead mill.

[0036] As above, according to the invention, defective particles areremoved to planarize the surface of a deposited film of ultra fineparticles supplied from the nozzle, by rolling or scraping, grinding orpolishing, or pressing the surface layer portion of the deposited film.If the film 2 is formed by pressing the deposited film, a pressureapparatus is used to press the deposited film 2 a, the surface scrapedfilm 2 b, or the surface scraped film 2 b after the grinding/polishingprocess. An example of the pressure apparatus is a pressure rollerhaving a circumferential surface worked to have a mirror surface, inplace of the grinding/polishing roller 12 shown in FIG. 1.

[0037]FIG. 3 shows a planarized ultra fine particle film formingapparatus 1 b according to another embodiment of the invention. Adifferent point of the planarized ultra fine particle film formingapparatus 1 b from the planarized ultra fine particle film formingapparatus 1 of the first embodiment resides in that a spray apparatus 21is used as part of the planarizing apparatus 15. The spray apparatus 21jets out planarizing fine particles 22 toward the deposited film 2 a togrind and polish the surface of the deposited film 2 a and form aplanarized film 2 c. The planarizing fine particles 22 are used forgrinding and polishing the surface of the deposited film 2 a. Theplanarizing fine particles 22 may be blown toward the substrate in amixed state with the ultra fine particles 7, or blown toward thesubstrate by using the spray apparatus 21 separately from the ultra fineparticles 7 which are supplied from the nozzle 4. In the apparatus shownin FIG. 3, the planarizing fine particles and ultra fine particles areblown separately. The spray apparatus 21 may be used in place of theattached particle removal apparatus 5 and film surface processingapparatus 6 of the planarized ultra fine particle film forming apparatus1 of the first embodiment, or in combination with the attached particleremoval apparatus 5 and film surface processing apparatus 6. As thespray apparatus 21, a nozzle or an electrostatic acceleration gun may beused. As shown in FIG. 4, the spray apparatus 21 is disposed so thatplanarizing fine particles 22 become obliquely incident upon thesubstrate in an incidence angle range of −60 degrees to −5 degrees or +5degrees to +60 degrees between the central axis 23 of a jet flow and thenormal 24 to the surface of the substrate 3. An example of the sprayapparatus 21 to be used in such a case is shown in FIG. 8A. As shown inFIG. 7A, the spray apparatus 21 may be disposed so that the planarizingfine particles jetted out from the spray apparatus 21 form a conicalshape having an angle range of −60 degrees to −5 degrees or +5 degreesto +60 degrees about the center of a jet flow. An example of the sprayapparatus 21 to be used in such a case is shown in FIG. 8B.

[0038] If the planarizing fine particles 22 and ultra fine particles 7are made to have the same composition, it is possible to prevent foreignmaterial from entering the film 2. It is preferable that the planarizingfine particles 22 have a particle diameter larger than that of the ultrafine particles 7. If the planarizing fine particles 22 have a rigidityhigher than that of the ultra fine particles 7, the grinding/polishingeffect can be enhanced.

[0039] Planarizing a ultra fine particle film by using such an apparatusis performed in the following manner. According to a thin film formingmethod of this invention, when ultra fine particles collide with thesubstrate, they are recombined together to form a thin or thick film ata low temperature. The planarizing process is performed to planarize thesurface of a deposited film of ultra fine particles to thereby form afilm excellent in density, uniformity, transparency and the like. In theplanarizing process of planarizing the deposited film of ultra fineparticles, planarizing fine particles having the grinding/polishingfunction are obliquely blown toward the surface of the deposited film tothereby grind and polish the surface and obtain a flat and smoothsurface. Thereafter, the same process is repeated each time after newultra fine particles are deposited on the flat and smooth surface toincrease the film thickness. Furthermore, by making the planarizing fineparticles and ultra fine particles have the same composition, it ispossible to prevent foreign material from entering the film.

[0040] An example of a spray or blowing method is illustrated in FIG.

[0041] 5. As shown, ultra fine particles 7 are jetted out of the nozzle4 and planarizing fine particles are jetted out of the spray apparatus21, both to be applied to the same point on the substrate 3.

[0042] If a spray angle of planarizing fine particles 22 having thegrinding/polishing function relative to the surface of the depositedfilm 2 a is 0 degree (at a right angle to the substrate surface),although there is a grinding function, an impact function relative tothe deposited film is greater so that the film is likely to have damagesand the ground region becomes spatially irregular and discontinuous. Itis therefore impossible to obtain a flat and smooth surface. Incontrast, if planarizing fine particles having the grinding/polishingfunction are obliquely blown toward the substrate surface, the impactfunction relative to the deposited film becomes small and thegrinding/polishing function relative to the deposited film becomesgreater so that the surface of the deposited film is ground and polishedspatially uniformly. It is therefore possible to obtain a flat andsmooth surface. However, if the spray angle of planarizing fineparticles having the grinding/polishing function relative to the surfaceof the deposited film becomes too large, the grinding/polishing functionlowers considerably.

[0043] When the degree of the grinding/polishing effect and the damagesof the surface of the deposited film are taken into consideration, it ispreferable to set the spray angle of planarizing fine particles havingthe grinding/polishing function relative to the surface of the depositedfilm to the incidence angle range of −60 degrees to −5 degree or +5degrees to +60 degrees relative to the substrate surface, although theoptimum spray angle depends on the material qualities of ultra fineparticles and planarizing fine particles. In blowing planarizing fineparticles having the grinding/polishing function toward the surface ofthe deposited film, the fine particles having the grinding/polishingfunction may be mixed with gas and blown from a nozzle or they may beelectrically charged and electrostatically accelerated and blown.

[0044] In the embodiment illustrated in FIG. 5, if the ultra fineparticles 7 and planarizing fine particles 22 are applied to the sameposition of the substrate 3, a flow of the ultra fine particles 7 forforming the deposited film 2 a may be disturbed by a flow of theplanarizing fine particles 22 so that a film cannot be formed stablydepending upon film forming conditions. To avoid this, as shown in FIG.6, the ultra fine particles 7 and planarizing fine particles 22 areapplied to offset positions of the substrate 3, or flows of the ultrafine particles 7 and planarizing fine particles 22 may be separated intime or space by using valves 25 and 26 and a valve switching controlapparatus 27, so that interference between two flows can be eliminatedand a process of forming the deposited film 2 a of ultra fine particles7 and a planarizing process using planarizing fine particles 22 can beperformed perfectly.

[0045] The planarizing fine particles having the grinding/polishingfunction may be blown toward the substrate by making them have a beamshape by using a nozzle or an electrostatic acceleration gun.Alternatively, as shown in FIG. 7A, by controlling the jet conditions ofthe nozzle or electrostatic acceleration gun, the planarizing fineparticles having the grinding/polishing function may be blown to form aconical shape having an angle range of −60 degrees to −5 degrees or +5degrees to +60 degrees about the center of a jet flow output from thenozzle or electrostatic acceleration gun, with similar expectedadvantages.

[0046] Although this conical spray shown in FIG. 7A may be performedonly for the planarizing fine particles 22, it may be performed for amixture of the planarizing fine particles 22 and ultra fine particles 7.In this case, the nozzle 4 for blowing ultra fine particles 22 can beomitted. If mixed particles are used, it is effective for thegrinding/polishing function that the diameter of the planarizing fineparticles 22 is larger than that of the ultra fine particles 7, asdescribed earlier. In this case, as shown in FIGS. 7B and 7C, theparticle diameter distribution pattern of mixed particles have twopeaks, one by the planarizing fine particles 22 and the other by theultra fine particles 7.

[0047] Planarizing fine particles having the grinding/polishing functionmixed with ultra fine particle for forming a film are jetted out towarda substrate or a deposited film from the same nozzle or electrostaticacceleration gun so that a flat and smooth film can be formed easily. Asdescribed in JP-A-11-117328, when a film of brittle ultra fine particlesis formed, a mechanical impact force sufficient for crushing ultra fineparticles is necessary. In this case, an apparatus (nozzle orelectrostatic acceleration gun) for blowing ultra fine particles forforming a film and an apparatus (nozzle or electrostatic accelerationgun) for blowing planarizing fine particles having thegrinding/polishing function are disposed separately. Each blowingapparatus is set so that the ultra fine particles for forming a film andthe planarizing fine particles having the grinding/polishing functionare blown in a beam shape. In accordance with the type of ultra fineparticles for forming a film, the incidence angle relative to thesubstrate, a jet flow density, a jet-out time, timings and the like arecontrolled to form a flat and smooth film at high speed.

[0048] As appreciated from the foregoing description, the inventionprovides techniques of forming a ultra fine particle film which hasultra fine particles sufficiently bonded together, sufficient density,flat surface and uniform density. Techniques of this invention forforming a metal ultra fine particle film through pressing andplanarizing are important in forming a laminated type piezoelectricactuator of a low drive voltage or the like. The laminated typepiezoelectric actuator is made of a lamination of PZT as piezoelectricmaterial and metal such as platinum and silver as electrode material.Since the film surface can be planarized, the film opticalcharacteristics are improved. For example, a TiO₂ film is opticallytransparent.

[0049] Even if the supply amount of ultra fine particles for forming afilm is not stable, a film thickness per one grinding/polishing processcan be controlled precisely. It is therefore possible to uniformly andprecisely control the thickness of a large area film to be formed byrepeating this process.

What we claim are:
 1. A planarized ultra fine particle film formingmethod for forming a planarized ultra fine particle film from adeposited film of ultra fine particles formed by supplying the ultrafine particles to a substrate, the method comprising one or more of aplanarizing step of planarizing a surface of the deposited film of theultra fine particles supplied to the substrate.
 2. A planarized ultrafine particle film forming method according to claim 1, wherein theultra fine particles are ceramic or metal ultra fine particles.
 3. Aplanarized ultra fine particle film forming method according to claim 1,wherein said planarizing step rolls, scrapes, grinds or polishes asurface layer portion of the deposited film of the ultra fine particlessupplied to the substrate.
 4. A planarized ultra fine particle filmforming method according to claim 1, wherein said planarizing steppresses a surface layer portion of the deposited film of the ultra fineparticles supplied to the substrate.
 5. A planarized ultra fine particlefilm forming method according to claim 1, wherein the deposited film iseither applied with a mechanical impulse force, which is equal to orhigher than Vickers hardness of the ultra fine particles, to the ultrafine particles supplied to the substrate to crush the ultra fineparticles and make the particles bond together, or not applied with themechanical impulse force.
 6. A planarized ultra fine particle filmforming method according to claim 5, wherein the mechanical impact forceis applied to the deposited film: by accelerating ultra fine particlesby an electrostatic field or gas transport and spraying the particles toand colliding the particles with the ultra fine particles on thesubstrate; by using a brush or roller rotating at high speed, a pressureneedle moving up and down at high speed, or a piston moving at highspeed by explosion force; or by generating ultra sounds.
 7. A planarizedultra fine particle film forming method according to claim 5, wherein inaccordance with the mechanical impact force to be applied to the ultrafine particles, the ultra fine particles are processed so that the ultrafine particles can be easily crushed with the mechanical impact force inexcess of a mechanical strength or a brittle fracture strength of theultra fine particles.
 8. A planarized ultra fine particle film formingmethod according to claim 7, wherein processing the ultra fine particlesis: adjusting a preliminary baking temperature of source ultra fineparticles; heating ultra fine particles prepared to have a particlediameter of about several tens nm and aggregating the particles to formsecondary particles having a particle diameter of about 50 nm to 1 μm;or forming cracks in ultra fine particles so as to make the particleseasy to be crushed, by using for a long time period milling apparatus, abreaker or crusher such as a ball mill, a jet mill, a vibration mill, anepicyclic mill and a bead mill.
 9. A planarized ultra fine particle filmforming method according to claim 1, wherein the deposited film isformed by applying an ion beam or plasma to the ultra fine particlessupplied to the substrate.
 10. A planarized ultra fine particle filmforming apparatus for forming a planarized ultra fine particle film froma deposited film of ultra fine particles formed by supplying the ultrafine particles to a substrate, the apparatus comprising at least one of:an attached particle removal apparatus for rolling or scraping a surfacelayer portion of the deposited film of the ultra fine particles suppliedto the substrate; a film surface processing apparatus for grinding orpolishing the surface layer portion; and a pressure apparatus forpressing the deposited film.
 11. A planarized ultra fine particle filmforming apparatus according to claim 10, wherein the substrate and saidattached particle removal apparatus or said film surface processingapparatus are structured to be movable relative to each other.
 12. Aplanarized ultra fine particle film forming apparatus according to claim10, further comprising a mechanical impact force, which is equal to orhigher than Vickers hardness of the ultra fine particles, loadingapparatus for loading a mechanical impact force to the ultra finepatterns of the deposited film.
 13. A plana-rized ultra fine particlefilm forming apparatus according to claim 10, further comprising aradiation apparatus for radiating an ion beam or plasma to the ultrafine patterns of the deposited film.
 14. A planarized ultra fineparticle film forming method for forming a planarized ultra fineparticle film from a deposited film of ultra fine particles formed bysupplying the ultra fine particles to a substrate, the method comprisingone or more of a planarizing step of planarizing a surface of thedeposited film of the ultra fine particles by blowing planarizing fineparticles having a grinding/polishing function at an oblique incidenceangle toward the surface of the deposited film.
 15. A planarized ultrafine particle film forming method according to claim 14, wherein theplanarizing fine particles are accelerated by using an electrostaticfield or gas and blown toward the surface of the deposited film of theultra fine patterns.
 16. A planarized ultra fine particle film formingmethod according to claim 14, wherein the incidence angle of a flow ofthe planarizing fine particles relative to the substrate is in a rangeof −60 degrees to −5 degrees or +5 degrees to +60 degrees.
 17. Aplanarized ultra fine particle film forming method according to claim14, wherein the planarizing fine particle have a same composition asthat of the ultra fine particles.
 18. A planarized ultra fine particlefilm forming method according to claim 14, wherein the planarizing fineparticle have a particle diameter larger than that of the ultra fineparticles.
 19. A planarized ultra fine particle film forming methodaccording to claim 14, wherein the planarizing fine particle have arigidity higher than that of the ultra fine particles.
 20. A planarizedultra fine particle film forming apparatus for forming a planarizedultra fine particle film from a deposited film of ultra fine particlesformed by supplying the ultra fine particles to a substrate, whereinplanarizing fine particles having a grinding/polishing function areblown at an oblique incidence angle toward the surface of the depositedfilm.
 21. A planarized ultra fine particle film forming apparatusaccording to claim 20, further comprising a spray apparatus such as anozzle and an electrostatic acceleration gun for jetting out, at thesame time or separately, the ultra fine particles and the planarizinghaving the grinding/polishing function, toward the substrate, and acenter axis of a jet flow of said spray apparatus being set in anincidence angle range of −60 degrees to −5 degrees or +5 degrees to +60degrees relative to a surface of the substrate.
 22. A planarized ultrafine particle film forming apparatus according to claim 20, furthercomprising a spray apparatus such as a nozzle and an electrostaticacceleration gun for jetting out, at the same time or separately, theultra fine particles and the planarizing having the grinding/polishing 1function, toward the substrate, and a flow of the ultra fine particlesor planarizing particles jetted out from said spray apparatus being setto have a conical shape having an incidence angle range of −60 degreesto −5 degrees or +5 degrees to +60 degrees about a center axis of a jetflow of said spray apparatus.